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一种高电离率大面积氧化物阴极等离子体源阴极及制作方法

Release time:2021-07-24 Hits:

Affilication of Author(s): 赢博娱乐官方下载正规渠道

Disigner of the Invention: liuyu,余鹏程,leijiuhou,caojinxiang

Patent description: 发明

Application Number: 201810225363.3

Number of Inventors: 5

Service Invention or Not: no

Publication Date: 2018-08-17

First Author: 李敏迟