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一种大面积高电离率氧化物阴极等离子体源

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Disigner of the Invention:胡广海,金晓丽,袁林,zhangqiaofeng,杨尚川

Patent description:实用新型

Application Number:201520090240.5

Number of Inventors:6

Service Invention or Not:no

Publication Date:2015-06-10

Authorization Date:2015-06-10

First Author:xiejinlin

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